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Transfer Eletrostatic Carrier T-ESC^®
Handling and Chucking Systems
- Automated Chucking Systems
- Chucking Systems and Components
- Chucking Tools
  - Racket Unipolar
  - Adapter Side Table
  - Racket Bipolar
- Special Equipment
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Latest News

mechatronic systemtechnik and ProTec Carrier Systems complement one another in the field of the handling of thin substrates

2011-04-20: The two specialists in thin wafer handling systems, mechatronic systemtechnik and ProTec Carrier Systems (PCS), are intensifying their collaboration in the field of handling thin substrates by means of T-ESC^®-Technology.

ADAPTER SIDE TABLE

Essential manual alignment tool for using the Adapter Edge Racket in combination with different-sized wafers and carriers
Helps to center a substrate/wafer of smaller size before being clamped by the Adapter Edge Racket
In a subsequent step, the Adapter Edge Racket transports the smaller-sized substrate/wafer (e.g. 6”) and positions it centrically onto a larger-sized carrier (e.g. 8”) which had already been placed on the MCU 3000 working plate

Additional Information

Optionally, substrates/wafers can also be placed onto the Adapter Side Table with a pair of tweezers or vacuum tweezers.

Technical Data

Sizes	4” to 6”, 6”to 8”, 8” to 12”, customized solutions
Process Media	Compressed air