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Transfer Eletrostatic Carrier T-ESC^®
Handling and Chucking Systems
- Automated Chucking Systems
  - Chucking Module CM 3000
  - Fully Automated Chucking Unit ACU 3000
  - Stand-alone Chucking Unit SCU 3000
- Chucking Systems and Components
- Chucking Tools
- Special Equipment
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Latest News

mechatronic systemtechnik and ProTec Carrier Systems complement one another in the field of the handling of thin substrates

2011-04-20: The two specialists in thin wafer handling systems, mechatronic systemtechnik and ProTec Carrier Systems (PCS), are intensifying their collaboration in the field of handling thin substrates by means of T-ESC^®-Technology.

FULLY AUTOMATED CHUCKING UNIT ACU 3000

Fully automated electrostatic chucking/de-chucking unit, consisting of

Chucking Module CM 3000 as main unit
Thin Wafer Sorter/Handler as framework

Technical Data

Machine Dimensions	L x W x H: 1440 x 1485 x 2092 mm
Weight	1.000 kg