MANUAL CHUCKING UNIT MCU 3000
Manually operated electrostatic chucking/de-chucking unit
Available in three basic sizes: 4”/6”, 6”/8”, and 8”/12”
Additional Information
- Working plate on top of the unit determines the substrate/wafer size
- Change of size by replacing working plate to upgrade from 4” to 6”, 6” to 8”, 8” to 12”, or to downgrade from 6” to 4”, 8” to 6”, 12” to 8”
- Chucking voltage is programmable up to 3 kV
- Enhanced SIEMENS PLC S7/200 controller contains the GUI and several (self-)diagnostic features
- LCD touch-screen panel includes selectable screen display for voltage, current, and status information, customer’s chucking type settings and process conditions, etc.
- Parameter configuration settings are stored in customized data records for each carrier type
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Technical Data
Process Media |
Power supply |
| Machine Dimensions | L x W x H: 621 x 430 x 330 mm |
| Weight | 12,5 kg |
| Size | 4”, 6”, 8”, 12”, customized solutions, e.g. square-shaped solar cells |