Latest News

mechatronic systemtechnik and ProTec Carrier Systems complement one another in the field of the handling of thin substrates

2011-04-20: The two specialists in thin wafer handling systems, mechatronic systemtechnik and ProTec Carrier Systems (PCS), are intensifying their collaboration in the field of handling thin substrates by means of T-ESC®-Technology.

Read more …

MEDIA TEST KIT

Special measurement tool for

  • Measuring pressure and flow (N₂ or CDA, vacuum)
  • Ensuring that appropriate media are available in
    advance of the chucking process

Technical Data

Process Media Power supply 230 V
Dimensions L x W x H: 290 x 220 x 75 mm
Weight 3,0 kg