POLYMER T-ESC®
Consists of compounded polyimide foils with embedded and sealed copper layers
- Protects against penetration by liquids between wafer and carrier
- Resistive against commonly used chemicals in semiconductor manufacturing
Typical Applications
- Spin etching
- Spin cleaning
- Spin coating
- Optical inspection
- Probing
Qualified Equipment
- SEZ: RST 101, RST 102, RST 103
