Process Applications
Chuckable Substrates
- Chuckable Substrates
- Standard wafers (semiconductor, photovoltaic)
- Thin wafers (50 μm tested), Taico wafers
- “Compound wafers”
- GaAs/SiC (with or without GaN)
- Chuckable Substrates
- Pyrex 7740
- Bonded wafers
- Masks (e.g. stencil)
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