RACKET BIPOLAR
The Bipolar Racket is a multifunctional handling tool, employable for various applications. It enables safe and comfortable handling of thin and ultra-thin substrates/wafers using electro- static force, for example transportation of wafers onto carriers for chucking, microscopic analysis of substrates, de-taping, as well as optical surface inspection. The holohedral clamping of the substrates or wafers guarantees secure and damage-free transport.
Mobile electrostatic handling tool
- Generates electrostatic force for clamping, transporting, and chucking thin and ultra-thin substrates
- Powered by an integrated battery for wireless and tubeless handling
- Easy one-hand tool operated with a single switch
- Chucking/De-chucking is supported by vacuum/purge
- Flat/Notch marker supports manual pre-alignment
Technical Data
| Process Media | Power supply 9V battery |
| Optional Media | Compressed air |
| Sizes | 4”, 6”, 8”, 12”, customized solutions, e.g. square-shaped solar cells 156 x 156 mm |
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