SEPARATE COMPONENTS (ACCESSORIES FOR MCU 3000)

ADJUSTMENT SAMPLE

Setting tool

  • Supports a substrate/wafer position
  • Alignment for optimal contact by needles
  • Indispensable for all handling on MCU 3000
    in managing the “Daily Check”

SIDE TABLE

ptcs web-21
ptcs web-19

Manual alignment tool

  • Supports the pre-centering of a substrate/wafer
    before it is picked up with the appropriate racket
    and subsequent transport
    and is placed on a carrier (T-ESC®)
  • Serves as a “clipboard” for substrates/wafer,
    carrier, or already chucked carrier-wafer package

Additional Information

The transfer of substrates or wafers onto the
Side Table can also be performed with a pair of
tweezers or vacuum tweezers.

WORKING PLATE

ptcs-17
ptcs-38

Operational/functional disk

  • On which the actual process of chucking takes
    place, i.e. the thin or ultra-thin substrate/wafer
    is fixed or removed on a carrier (T-ESC®) by means
    of electrostatic clamping force
  • Enables up- or downgrades to another size:
    • upgrade from 4” to 6”, 6” to 8”, 8” to 12”
    • downgrade from 6” to 4”, 8” to 6”, 12” to 8”
  • Easy mounting by customer