STAND-ALONE CHUCKING UNIT SCU 3000
Stand-alone semi-automated electrostatic chucking/de-chucking unit
- Consists of a Chucking Module CM 3000
- Equipped with a stand, a special manual load port, and necessary interfaces, e.g. to access a host system
Technical Data
| Machine Dimensions | L x W x H: 650 x 700 x 1100 mm |
| Weight | 30 kg |
